Electron Backscatter Diffraction (EBSD) is a powerful tool for mapping crystal grain orientations, but its effectiveness is often limited by material properties; challenging factors such as beam sensitivity, charge sensitivity, low crystal symmetry, and fine grain size are especially pronounced in ceramics like hafnia and hafnon.
Using SEMCam, researchers successfully recorded high-quality EBSD patterns at low beam energies and doses—overcoming the common limitations of conventional setups. By pairing these patterns with the dictionary indexing technique, they achieved a major milestone: the first-ever EBSD orientation maps of hafnia and hafnon grains. This breakthrough opens the door to applying similar methods to other low-symmetry or beam-sensitive materials, expanding the boundaries of what EBSD can reveal.
Direct electron detection for EBSD of low symmetry & beam sensitive ceramics,
N.M. Della Ventura et al. Ultramicroscopy, 268, 114079 (2025)
Read the abstract here: https://www.sciencedirect.com/science/article/pii/S030439912400158X
The SEMCam is capable of recording much higher quality EBSD patterns at 10x lower beam dose than is possible with conventional detectors. Figure adapted from publication under license CC BY 4.0